How to bid on a Semiconductor Process Residual Gas Analyzer for the Department of Commerce

What the agency is buying

The Department of Commerce is seeking a semiconductor-grade Process Residual Gas Analyzer (RGA). This equipment will be used on flow systems, including an ALD reactor, as part of a CHIPS R&D Metrology program. The RGA needs to be compatible with low-volatility organometallic and metal halide precursors and process gases. The goal is to develop digital twin technology for semiconductor manufacturing equipment, which will help optimize processes and control, leading to cost savings for the US semiconductor industry.

Key dates and deadlines

This solicitation was published on August 31, 2026. All quotations must be submitted by September 14, 2026, at 10:00 AM ET. This is a firm deadline, and late submissions are typically not considered.

Who this opportunity suits

This opportunity is suitable for businesses specializing in analytical laboratory instrument manufacturing. The associated North American Industrial Classification System (NAICS) code is 334516, with a small business size standard of 1,000 employees. This is a full and open competition, meaning all qualified businesses are eligible to submit a quotation.

Firms with experience in semiconductor-grade equipment, particularly those compatible with specific chemical precursors and process gases, will find this relevant.

How to respond

To access the solicitation details and prepare your response, you will need to view the original source on the portal. Click the 'View original source' link. If the first click takes you to the portal's homepage, click the link again to go directly to the bid. You may need to create a free account to view all documents, though this is not always required.

Tips for a competitive response

When preparing your quotation, ensure you clearly address all technical specifications outlined in the solicitation, especially regarding compatibility with low-volatility organometallic and metal halide precursors and process gases. Highlight how your proposed RGA meets the requirements for use in a CHIPS R&D Metrology program and its role in developing digital twin technology.

Provide a clear and concise description of your product's capabilities and how it will serve as an online process diagnostic. Pay close attention to the submission instructions and ensure all required documentation is included before the deadline.